XY-Phi positioning system with 66 mm aperture (clean room) | XY linear motor, profile rail | Phi DC Motor | Travel 200 x 250 mm x 360°
Combinations of industrial axes

782300:097.26

High-precision positioning for samples up to 150 mm / 6"

The system consists of two linear stages PLT240 (X and Y Axes) and a rotary stage DT53, optional DT130 (Phi Axis). Both linear stages are driven by dynamic linear motors, the rotary stage by a DC motor.

Ideal for flexible set-up and expansion of cleanroom systems

High accuracy up to 0.4 µm / 0. 004°

High accelerations and speeds up to 1000 mm/s

Outstanding low heat emission at frequent start and stop phases

Designed for maintenance-free 24/7 operation in clean room environments

Options:

Various, high-resolution measuring systems
Structure with Z-axis, traverse, frame and housing
Linear motor with temperature monitoring
Adaptation to the process: travel range, adaptation plate, chuck, base plate, frame, enclosure, safety concept
Individual solution finding with 3D design for the positioning task

Individual extensions and customizations

The engineering services include the adaptation of the systems to your structure and the desired controls or the completely individual solution finding with 3D design for the application-specific positioning task.

In addition, we develop prototypes and are happy to adapt the systems to the environmental requirements of your application, e.g. particle emission, radiation, temperature, precision special parts production, working height, collision protection, safety concept, compensation factor and filter, sensor holder, brake, decoupling, special lubrication, special colors, holder, adapter, special motors with pharmaceutical approval, extensive documentation, test protocol, lifetime tests

Fields of application

Low-particle linear rotary positioning, e.g. for cutting systems, inspection systems, semiconductor production, wafer dicing & scribing (silicone, GaAs, InP, silica, glass, etc.), optics, photonics, laser technology

Specifications

782300:097.26		X	Y	Rz
Standard System		PLT240-200-DLM	PLT240-250-DLM	DT58-DC-R
Travel	[mm; deg]	200	250	n x 360
Repeatability unidirectional	[µm; deg]	± 0.4	± 0.4	± 0.004
Repeatability bidirectional	[µm; deg]	± 0.5	± 0.5	± 0.007
Positioning speed	[mm/s; deg/s]	530	530	100
Max. speed	[mm/s; deg/s]	1060	1060	150
Max. load	[N]	150	150	150
Weight	[kg]	60
Length x width x height	[mm]	600 x 650 x 225
Max. sample diameter		150 mm / 6" (optional larger as special version)
Guide		Profile Rail	Profile Rail
Motor		Iron Core Dynamic Linear Motor	Iron Core Dynamic Linear Motor	DC Motor
Feedback		Linear Scale	Linear Scale	Motor-Encoder
Optional features		Z-axis (e.g. PMT240) with traverse, linear motor with temperature monitoring, angular scale, adaption plate, chuck, base plate (granite / aluminum), frame, housing, safety concept and installation (emergency stop, door switch, safety light curtains, laser scanner, STO, SLS)
Clean room variants		up to clean room class ISO 6 (on request)
Beam variants		UV (DUV, EUV, X-ray, gamma on request)
Variants magnetism		magnetic