Nanomotion® Piezo Motor

This piezo motor provides very high resolution in the nanometer range.

High accelerations and very fast speeds can be realized. It has relatively low stiffness. In contrast to the Piezo LEGS^® motor, this motor type needs a measuring system. The control is more complex and requires a special amplifier. This motor is increasingly used in vacuum applications. Higher loads are also easy to accommodate by using motors in parallel operation.