Wafer and chip inspection / measurement

For you we find customized solutions for non-contact optical inspection of wafers, probe cards, dies and microchip components. For this purpose, we offer systems for layer thickness measurement, contact inspection, electrical characterization, probe head positioning, sample manipulation and metrology of wafer microstructures in the nanometer range.

Custom Positioning Systems

Double XYZ wafer positioner for scanners, microscopes and wafers up to 12 inch / 300 mm (clean room ISO2) | Stroke 720 x 720 x 100 mm — Double XYZ wafer positioner for scanners, microscopes and wafers up to 12 inch / 300 mm (clean room ISO2) | Stroke… High throughput screening of wafers up to 12" The inspection system with travel ranges up to 720...

XYZ Positioning System for wafer inspection up to 12 inch / 300 mm (cleanroom ISO 6) | travel 305 x 305 x 200 mm — XYZ Positioning System for wafer inspection up to 12 inch / 300 mm (cleanroom ISO 6) | travel 305 x 305 x 200 mm … Modular XYZ positioning system for wafer inspection This inspection system consists of the...

XYZ positioning system for optical inspection of wafers, PCBs, probe cards (clean room) | Stroke 200 x 200 mm — XYZ positioning system for optical inspection of wafers, PCBs, probe cards (clean room) | Stroke 200 x 200 mm … Highly stable non-contact optical measurement. This XY combination has a separate Z-vertical unit...

6-axis semiconductor inspection positioning system (clean room class ISO 4) | travel XYZ 30 x 30 x 20 mm, RxRy 4°, Rz 360° — 6-axis semiconductor inspection positioning system (clean room class ISO 4) | travel XYZ 30 x 30 x 20 mm, RxRy 4°,… 6-axis positioning for semiconductors This 6-axis positioning system provides precise and highly...

XYZ positioning system for automated inline wafer inspection e.g. layer thickness measurement | Stroke 650 x 650 x 100 mm — XYZ positioning system for automated inline wafer inspection e.g. layer thickness measurement | Stroke 650 x 650 x… Automated XYZ inline wafer inspection with large sample capacity This inspection system is...

XYZ positioning system for automated inspection - wafer / probe cards (clean room) | Stroke 720 x 720 x 100 mm — XYZ positioning system for automated inspection - wafer / probe cards (clean room) | Stroke 720 x 720 x 100 mm … High-precision quality inspection for cleanroom applications This inspection system (shown here...

XYZ positioning system for inspection & metrology by laser, optics e.g. solar cells, wafers | Stroke 1200 x 1400 x 200 mm — XYZ positioning system for inspection & metrology by laser, optics e.g. solar cells, wafers | Stroke 1200 x 1400 x… µm-accurate positioning and nanometer stability during measurement The gantry design enables...

XYZ Inspection gantry for semiconductors | XY Linear motor, profile rail | Z Ball screw, AC servo … High precision automatic 3D inspection of semiconductors This 3-axis positioning system moves a...

X Phi positioning system for inspection of wafers, biological samples (clean room ISO 5) | rotary axis and linear stage — X Phi positioning system for inspection of wafers, biological samples (clean room ISO 5) | rotary axis and linear… High-precision linear-rotatory positioning This X Phi system allows the positioning of samples...

XYZ Phi inspection system suitable for 12 inch wafers, printed circuit boards (clean room ISO 2) — XYZ Phi inspection system suitable for 12 inch wafers, printed circuit boards (clean room ISO 2) … Universal 4-axis granite gantry with cleanroom housing This XYZ Phi positioning system can be used...

Inspection System for Solar Wafers — Inspection System for Solar Wafers A KT310 form our standard program was combined with a rotation stage carrying a vacuum chuck. A...

Multi Axes Systems

MP220-4 Miniature XY-Phi-Delta Positioning System, Cardan on XY Aperture Stage | Hexapod Alternative | Travel XY 10 mm Rx Ry 4° | High Loads up to 10 kg — MP220-4 Miniature XY-Phi-Delta Positioning System, Cardan on XY Aperture Stage | Hexapod Alternative | Travel XY 10… Cardan on XY Stage with aperture This XY Phi Delta Aligner combines three vertically operating...

MP210-3 XYZ Positioning System, temperature stable 0 - 40°C | DC Motor, Lead Screw, Linear Scale | Aperture 150 mm / 5" | Travel 25 x 25 x 25 mm — MP210-3 XYZ Positioning System, temperature stable 0 - 40°C | DC Motor, Lead Screw, Linear Scale | Aperture 150 mm… Compact XYZ stage for samples up to 5" This XYZ system allows the positioning of a sample holder...

6-axis miniature XYZ-Theta-Phi-Delta positioning system (clean room ISO 5) | Tripod, Rotary Stage, XY- Stage, Hexapod Alternative | Travel XYZ 30 x 30 x 20 mm, RxRy 4°, Rz 360° — 6-axis miniature XYZ-Theta-Phi-Delta positioning system (clean room ISO 5) | Tripod, Rotary Stage, XY- Stage,… 6-axis alignment of wafers and optics up to 12" The 6-axis manipulator includes an XY Stage in the...

MP410-3 High Vacuum Aligner up to 10E-6 mbar | XYRz stepper motor, ball screw | Load 5 kg | Stroke 15 x 15 x 5° — MP410-3 High Vacuum Aligner up to 10E-6 mbar | XYRz stepper motor, ball screw | Load 5 kg | Stroke 15 x 15 x 5° … Surface aligner with stepper motor and ball screw With this aligner, second translational...

XYZ Universal Gantry | XY Linear Motor, Air Bearing | Z Ball Screw, DC Motor, Cross Roller | Stroke 600 x 600 x 100 mm — XYZ Universal Gantry | XY Linear Motor, Air Bearing | Z Ball Screw, DC Motor, Cross Roller | Stroke 600 x 600 x 100… Universal XYZ positioning system for precise overhead positioning tasks The customized processing...

XYZ Multi-axis gantry system | XY linear motor, profile rail | Z ball screw, AC servo | Stroke 500 x 700 x 100 mm … High-speed multi-axis gantry system This versatile adaptable gantry for overhead applications is...

XY-2Z 4-Axis Gantry with aperture | XY linear motor, profile rail, air bearing | Z ball screw, DC motor | Travel… Gantry with aperture and bilateral sensor positioners This XYZ gantry positioning system allows...

XYZ AFM gantry for wafer inspection, microscopy | travel up to 550 x 1550 mm | air bearing, ball screw, belt, stepper motor — XYZ AFM gantry for wafer inspection, microscopy | travel up to 550 x 1550 mm | air bearing, ball screw, belt,… Highly stable AFM air bearing gantry with large travel ranges This very rigid XYZ gantry is...

XY-Phi positioning system with 66 mm aperture (clean room) | XY linear motor, profile rail | Phi belt, DC Motor |… Precise and highly dynamic for samples up to 150 mm / 6" The XY Phi positioning system consists of...

XY-Z-Phi positioning system with 66 mm aperture (clean room) | XY linear motor, profile rail | Z cross roller, ball… Precise and highly dynamic for samples up to 150 mm / 6" The system consists of two linear stages...

XY-Phi positioning system with 66 mm aperture (clean room) | XY linear motor, profile rail | Phi DC Motor | Travel… High-precision positioning for samples up to 150 mm / 6" The system consists of two linear stages...

Standard Axes & Stages

PLT165-SM — PLT165-SM High load linear stage (ball screw), travel 100 - 500 mm, rep ± 3.9 µm, load 25 kg, speed 80 mm/s ...

PMT160-DC — PMT160-DC Precision linear stage (ball screw), travel 50 -300 mm, rep ± 1.7 µm, load 4,5 kg, speed 60 mm/s ...

PMT160-SM — PMT160-SM Precision linear stage (ball screw), travel 50 -300 mm, rep ± 1.9 µm, load 15 kg, speed 20 mm/s ...

DT200-DC - Drehtische — DT200-DC Rotary stage with very flat design. For this reason versatile combinations are possible. Driven by...

KT470-SM — KT470-SM High load XY stage (ball screw), travel 308 x 308 mm, rep ± 2.3 µm, load 23 kg, speed 40 mm/s ...

KT405-EDLM — KT405-EDLM Performance XY stage (linear motor), travel 320 x 320 mm, rep ± 0.3 µm, load 10 kg, speed 150 mm/s...

DT155-NM — DT155-NM High-resolution rotary stage, unlimited travel, rep up to 0.0003°, speed up to 300°/s, load up to...

Vacuum / Cleanroom

MT53 — MT53 Miniature linear stage 53 x 53 x 20 mm, HV / UHV / DUV / EUV, travel 10 mm, repro 0.2 µm, load 0.8...

DT310 — DT310 Flat aperture rotary stage HV, DUV / EUV, cleanroom ISO 5, n x 360°, rep 0.004°, speed 59°/s, Load...

KDT310-SM-HV — KDT310-SM-HV Heavy load XY scanning stage HV, DUV, Cleanroom ISO 6, 100 mm travel, travel 100 x 100 mm, rep up...

DT155 — DT155 High-resolution rotary stage with large aperture UHV, DUV / EUV, cleanroom ISO 6, n x 360°, rep...

HDT255 — HDT255 Aperture lifting stage UHV, DUV / EUV, ISO 6, travel 16 mm, rep 0.7 µm, 10 kg load, speed 16 mm/s ...

KT106/170 — KT106/170 XY Sample Stage HV / UV / DUV, ISO 4, Travel 136 x 170 mm, Rep 2.9 µm, Load 5 kg, Speed 20 mm/s ...

KDT105 — KDT105 High resolution XY scanning stage HV / UHV / EUV, 50 mm travel, 40 mm aperture, 0.3 µm...

KT105 — KT105 High resolution XY stage HV / UHV / EUV, 50 mm travel, 0.3 µm repeatability, 3 kg load ...

MT130 — MT130 EUV miniature linear stage 155 x 130 x 43 mm, UHV / DUV / EUV, ISO 5, travel up to 50 mm, rep 2.3...

LT300 — LT300 Precise high load linear stage HV / UHV / EUV, ISO 4, 50 - 100 mm travel, 0.5 µm repeatability, 10...

LA170 — LA170 Precise high load XYZ linear axis HV / UHV / EUV, 60 - 130 mm travel, 0.5 µm repeatability, 20 kg...

LA97 — LA97 Nanometer linear stage HV / UHV up to 10E-11, 100 - 300 mm travel, 0.02 µm repeatability, up to 10...

LA95 — LA95 Precision linear stage HV / UHV / UV / DUV, ISO 4, Travel 10 - 185 mm, Rep 0.4 µm, Load 4.5 kg,...

LA85 — LA85 Focus linear stage HV / DUV, cleanroom ISO 6, travel 25 - 50 mm, rep 1.6 µm, speed 60 mm/s, load 4...

DT230-SM — DT230-SM High-resolution, stable aperture rotary stage UHV, DUV / EUV, cleanroom ISO 6, n x 360°, rep...

LA80 — LA80 High speed linear stage HV / UHV / EUV, ISO 4, 200 -500 mm travel, 0.4 µm repeatability, 5 kg load...

XYZ Transfer Stage — XYZ Transfer Stage Fast 3-axis UHV system LA80-2LA95 UV / UHV / EUV, max. 500 mm travel, 2 µm repeatability, 5 kg...

3LT300 - Vakuum / Reinraum Mehrachssysteme — 3LT300 XYZ manipulator Three axes manipulator for ultra high vacuum with travel of 100 x 10 x 10 mm. Dry...

Ball & Lead Screw Drives

KGT 1112 — KGT 1112 Nut with connecting thread, 4-point-contact and internal ball return ...

GGT M4x1P0.5 — GGT M4x1P0.5 Cleanroom ISO3, up to 10E-11 mbar, length 112 mm, 0.1 mm lead, 0.002 kN load ...

KGT 1214 — KGT 1214 Cylindrical nut with 4-point-contact and internal ball return ...

KGT 1412 / 1432 — KGT 1412 / 1432 Flange single nut with 4-point-contact with internal ball return ...

KGT 1510 — KGT 1510 Spring preloaded double nut with 2-point-contact and internal ball return ...

KGT 2422 — KGT 2422 Flange single nut with 4-point-contact with external ball return and dual start ...

KGT ETA+ — KGT ETA+ Energy-efficient ETA+ ball screws with reduced friction and high rigidity ...

KGT 1416 — KGT 1416 Einzelmutter mit 4-Punkt-Kontakt

KGT 2412 — KGT 2412 Flange single nut with 4-point-contact with external ball return ...

EUV know-how

Material selection, nanometer coating, suitable lubricants / lubricant-free, cleaning

up to 10 million cycles

Air bearings, lifetime tests, integrated maintenance concepts / maintenance-free

5 Nanometer

And even higher precision for all XYZ-Rx-Ry-Rz motions

Individual customization and development of your Innovaiton

Optimal positioning solution for your application with a fast and free 3D design

Design of functional samples, prototypes up to series production

Integrated development of your mechanics, electronics and software

Series production of your innovation on > 3.900 m² production area
more about the technical specifications

Customization to your specific process requirements

Cleanroom systems up to Class 2

On more than 100 m² of cleanroom space, we exclusively manufacture high-precision and particle-free state-of-the-art technology for cleanroom systems up to ISO 14644-1 Class 2.

More on series development

Vacuum standard axes up to 10^-12

Our high-precision modular vacuum stages for linear, lifting, rotary and XYZ positioning have proven themselves over decades. They withstand the most extreme life tests with 24/7 operation.

Go to Vacuum Standard axes

Individual life cycle tests

We implement your life cycle tests for you at our numerous universal test stands for various individual test scenarios in our measurement laboratories.

More about test and measurement

Are you looking for a technical solution for your application?

Francisco Samuel
Consulting &
Project Management

T +49 (0) 351 88585-85

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