XYZ Positioning Systems for Semiconductor Applications
We provide conventional orthogonal XYZ systems, gantry systems in different precision classes, with and without air bearings, and multi-axis combinations for any degree of freedom when moving items. We select a controller to match, in accordance with your specifications, and only deliver the multi-axis system after it has been put into service and tested.
Custom Positioning Systems
Multi Axes Systems
Ball & Lead Screw Drives
Individual customization and development of your Innovaiton
- Optimal positioning solution for your application with a fast and free 3D design
- Design of functional samples, prototypes up to series production
- Integrated development of your mechanics, electronics and software
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Series production of your innovation on > 3.900 m² production area
more about the technical specifications
Cleanroom systems up to Class 2
On more than 100 m2 of cleanroom space, we exclusively manufacture high-precision and particle-free state-of-the-art technology for cleanroom systems up to ISO 14644-1 Class 2.
More on series development
Vacuum standard axes up to 10-12
Our high-precision modular vacuum stages for linear, lifting, rotary and XYZ positioning have proven themselves over decades. They withstand the most extreme life tests with 24/7 operation.
Go to Vacuum Standard axes
Individual life cycle tests
We implement your life cycle tests for you at our numerous universal test stands for various individual test scenarios in our measurement laboratories.
More about test and measurement