Semiconductor Manufacturing & Handling

For you we develop customized solutions in standard, electron beam and EUV lithography for assembly or integration into your application. For this we offer systems for beam shaping, beam homogenization or beam uniformization and zoom e.g. adjustment for microstructuring, steels as well as lens mask positioning or filter adjustment.

Custom Positioning Systems

Linear Rotary Actuator (Z-Phi) with integrated motion control for automated precision assembly — Linear Rotary Actuator (Z-Phi) with integrated motion control for automated precision assembly High-precision automated assembly of miniaturized components This industrial rotary-stroke...

DUV polarization filter for miniaturization in semiconductor lithography | Positioning system for wafer exposure in dry, oxygen-free pure nitrogen atmosphere — DUV polarization filter for miniaturization in semiconductor lithography | Positioning system for wafer exposure in… Yield maximization in the smallest possible construction space This high-precision positioning...

XY theta alignment of UV exposure masks | High-precision positioning system for wafer exposure in dry nitrogen atmosphere — XY theta alignment of UV exposure masks | High-precision positioning system for wafer exposure in dry nitrogen… µm alignment for microstructuring under extreme conditions This 3-axis mask system is specially...

Compact 3D mask aligner for SMT semiconductor printing / lithography | XY Phi positioning system (cleanroom, UV) for 650 x 650 mm / GEN 3 — Compact 3D mask aligner for SMT semiconductor printing / lithography | XY Phi positioning system (cleanroom, UV)… Compact and precise aligner with high throughput With this 225 mm flat aligner, two translative...

Handling System for Organic LED — Handling System for Organic LED Due to space constraints two frames where set inside each other and mounted between two rotary...

Double XY linear axis for high-precision adjustment of lenses for wafer steppers | ultra-fine UV exposure in the clean room — Double XY linear axis for high-precision adjustment of lenses for wafer steppers | ultra-fine UV exposure in the… High precise adjustment of two optics This high-precision double linear axis was developed...

Multi Axes Systems

MP220-4 Miniature XY-Phi-Delta Positioning System, Cardan on XY Aperture Stage | Hexapod Alternative | Travel XY 10 mm Rx Ry 4° | High Loads up to 10 kg — MP220-4 Miniature XY-Phi-Delta Positioning System, Cardan on XY Aperture Stage | Hexapod Alternative | Travel XY 10… Cardan on XY Stage with aperture This XY Phi Delta Aligner combines three vertically operating...

MP410-3 High Vacuum Aligner up to 10E-6 mbar | XYRz stepper motor, ball screw | Load 5 kg | Stroke 15 x 15 x 5° — MP410-3 High Vacuum Aligner up to 10E-6 mbar | XYRz stepper motor, ball screw | Load 5 kg | Stroke 15 x 15 x 5° … Surface aligner with stepper motor and ball screw With this aligner, second translational...

MP700-3 Flat 3D Aligner | XYRz linear motor, air bearing | Aperture 730 mm | Load 28 kg | Travel 5 x 5 mm x 5° — MP700-3 Flat 3D Aligner | XYRz linear motor, air bearing | Aperture 730 mm | Load 28 kg | Travel 5 x 5 mm x 5° … Parallel kinematic 3D aligner with large aperture With this aligner, second translational motions...

XY-Phi positioning system with 66 mm aperture (clean room) | XY linear motor, profile rail | Phi belt, DC Motor |… Precise and highly dynamic for samples up to 150 mm / 6" The XY Phi positioning system consists of...

XY-Z-Phi positioning system with 66 mm aperture (clean room) | XY linear motor, profile rail | Z cross roller, ball… Precise and highly dynamic for samples up to 150 mm / 6" The system consists of two linear stages...

XYZ Positioning System with XY Stage (cleanroom ISO 6) | XY cross roller, ball screw, stepper motor | Z lead screw | travel 305 x 305 x 200 mm — XYZ Positioning System with XY Stage (cleanroom ISO 6) | XY cross roller, ball screw, stepper motor | Z lead screw… Modular, cleanroom-compatible 3-axis system This positioning system includes the XY-Stage KT470 on...

XY-Phi positioning system with 66 mm aperture (clean room) | XY linear motor, profile rail | Phi DC Motor | Travel… High-precision positioning for samples up to 150 mm / 6" The system consists of two linear stages...

Standard Axes & Stages

DT155-NM — DT155-NM High-resolution rotary stage, unlimited travel, rep up to 0.0003°, speed up to 300°/s, load up to...

Vacuum / Cleanroom

MT53 — MT53 Miniature linear stage 53 x 53 x 20 mm, HV / UHV / DUV / EUV, travel 10 mm, repro 0.2 µm, load 0.8...

DT310 — DT310 Flat aperture rotary stage HV, DUV / EUV, cleanroom ISO 5, n x 360°, rep 0.004°, speed 59°/s, Load...

DT155 — DT155 High-resolution rotary stage with large aperture UHV, DUV / EUV, cleanroom ISO 6, n x 360°, rep...

HDT255 — HDT255 Aperture lifting stage UHV, DUV / EUV, ISO 6, travel 16 mm, rep 0.7 µm, 10 kg load, speed 16 mm/s ...

KT106/170 — KT106/170 XY Sample Stage HV / UV / DUV, ISO 4, Travel 136 x 170 mm, Rep 2.9 µm, Load 5 kg, Speed 20 mm/s ...

KDT105 — KDT105 High resolution XY scanning stage HV / UHV / EUV, 50 mm travel, 40 mm aperture, 0.3 µm...

KT105 — KT105 High resolution XY stage HV / UHV / EUV, 50 mm travel, 0.3 µm repeatability, 3 kg load ...

MT130 — MT130 EUV miniature linear stage 155 x 130 x 43 mm, UHV / DUV / EUV, ISO 5, travel up to 50 mm, rep 2.3...

LA170 — LA170 Precise high load XYZ linear axis HV / UHV / EUV, 60 - 130 mm travel, 0.5 µm repeatability, 20 kg...

PLT240 — PLT240 Precise high-load linear stage HV / UV / DUV, ISO 6, travel 50 - 850 mm, load 100 kg, rep 0.4 µm,...

LA97 — LA97 Nanometer linear stage HV / UHV up to 10E-11, 100 - 300 mm travel, 0.02 µm repeatability, up to 10...

LA105 — LA105 Translation stage with piezo offset HV / UV / DUV, ISO 3, travel 7 - 100 mm, load 3 kg, rep ±...

LA95 — LA95 Precision linear stage HV / UHV / UV / DUV, ISO 4, Travel 10 - 185 mm, Rep 0.4 µm, Load 4.5 kg,...

DT230-SM — DT230-SM High-resolution, stable aperture rotary stage UHV, DUV / EUV, cleanroom ISO 6, n x 360°, rep...

LA80 — LA80 High speed linear stage HV / UHV / EUV, ISO 4, 200 -500 mm travel, 0.4 µm repeatability, 5 kg load...

XYZ Transfer Stage — XYZ Transfer Stage Fast 3-axis UHV system LA80-2LA95 UV / UHV / EUV, max. 500 mm travel, 2 µm repeatability, 5 kg...

3LT300 - Vakuum / Reinraum Mehrachssysteme — 3LT300 XYZ manipulator Three axes manipulator for ultra high vacuum with travel of 100 x 10 x 10 mm. Dry...

Ball & Lead Screw Drives

KGT 1112 — KGT 1112 Nut with connecting thread, 4-point-contact and internal ball return ...

GGT M4x1P0.5 — GGT M4x1P0.5 Cleanroom ISO3, up to 10E-11 mbar, length 112 mm, 0.1 mm lead, 0.002 kN load ...

KGT 1214 — KGT 1214 Cylindrical nut with 4-point-contact and internal ball return ...

KGT 1412 / 1432 — KGT 1412 / 1432 Flange single nut with 4-point-contact with internal ball return ...

KGT 1510 — KGT 1510 Spring preloaded double nut with 2-point-contact and internal ball return ...

KGT 2422 — KGT 2422 Flange single nut with 4-point-contact with external ball return and dual start ...

KGT ETA+ — KGT ETA+ Energy-efficient ETA+ ball screws with reduced friction and high rigidity ...

KGT 1416 — KGT 1416 Einzelmutter mit 4-Punkt-Kontakt

KGT 2412 — KGT 2412 Flange single nut with 4-point-contact with external ball return ...

EUV know-how

Material selection, nanometer coating, suitable lubricants / lubricant-free, cleaning

up to 10 million cycles

Air bearings, lifetime tests, integrated maintenance concepts / maintenance-free

5 Nanometer

And even higher precision for all XYZ-Rx-Ry-Rz motions

Individual customization and development of your Innovaiton

Optimal positioning solution for your application with a fast and free 3D design

Design of functional samples, prototypes up to series production

Integrated development of your mechanics, electronics and software

Series production of your innovation on > 3.900 m² production area
more about the technical specifications

Customization to your specific process requirements

Cleanroom systems up to Class 2

On more than 100 m² of cleanroom space, we exclusively manufacture high-precision and particle-free state-of-the-art technology for cleanroom systems up to ISO 14644-1 Class 2.

More on series development

Vacuum standard axes up to 10^-12

Our high-precision modular vacuum stages for linear, lifting, rotary and XYZ positioning have proven themselves over decades. They withstand the most extreme life tests with 24/7 operation.

Go to Vacuum Standard axes

Individual life cycle tests

We implement your life cycle tests for you at our numerous universal test stands for various individual test scenarios in our measurement laboratories.

More about test and measurement

Are you looking for a technical solution for your application?

Francisco Samuel
Consulting &
Project Management

T +49 (0) 351 88585-85

Our references